Method and apparatus for cleaning a substrate using non-newtonian fluids

ABSTRACT

An apparatus for cleaning a substrate includes an application unit having a top inlet conduit and a bottom plate section. The top inlet conduit has an opening for receiving a non-Newtonian fluid and the bottom plate section has an opening through which the non-Newtonian fluid can flow. The bottom plate section is perpendicular to the top inlet conduit, and a surface of the bottom plate section is disposed above and parallel to a surface of a substrate so as to define a gap between the surface of the bottom plate section and the surface of the substrate. The defined gap has a height configured to create a flow of the non-Newtonian fluid in which a portion of the flow exhibits plug flow, and the plug flow moves over the surface of the substrate to remove particles from the surface of the substrate.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a divisional of U.S. patent application Ser. No.11/153,957, filed on Jun. 15, 2005 (now U.S. Pat. No. 8,043,441 B2).Further, this application is related to 1) U.S. application Ser. No.11/154,129, filed on Jun. 15, 2005 (now U.S. Pat. No. 7,416,370 B2), andentitled “Method and Apparatus for Transporting a Substrate UsingNon-Newtonian Fluid,” and 2) U.S. patent application Ser. No.10/261,839, filed on Sep. 30, 2002 (now U.S. Pat. No. 7,234,477 B2), andentitled “Method and Apparatus for Drying Semiconductor Wafer SurfacesUsing a Plurality of Inlets and Outlets Held in Close Proximity to theWafer Surfaces.” The disclosures of these applications are incorporatedherein by reference in their entirety for all purposes.

BACKGROUND

Throughout a semiconductor device manufacturing process, a semiconductorwafer is cleaned to remove particles, such as contamination from adepositions system, from the surface of the semiconductor wafer. If theparticles are not removed, the particles will contaminate thesemiconductor wafer resulting in damage to the electronic devices on thesemiconductor wafer. As such, cleaning operations define a very criticalstep that is repeated many times throughout the manufacturing process.

One method to clean the semiconductor wafer is to rinse the surface ofthe semiconductor wafer with deionized water. However, cleaning thesemiconductor water with water is terribly inefficient because theprocess uses an immense amount of water to remove only a very minuteamount of contaminant. Specifically, the inefficiency is caused by theNewtonian properties of water. FIG. 1 is a shear stress and straindiagram of water. The shear stress and strain diagram is a plot of ashear strain rate versus shear stress. As shown in FIG. 1, the shearstrain rate and shear stress of water plot as a straight line on thediagram. Thus, water (and all Newtonian fluids) is characterized byhaving a shear stress that is linearly proportional to the shear strainrate. The plot goes through origin 101 of the diagram. Accordingly, anyfinite shear stress applied on the water can initiate flow. In otherwords, water has minimal or no yield point, which is the minimum forcerequired to initiate flow in water.

FIG. 2 is a velocity flow profile for a flow of water on a surface ofsemiconductor wafer 202. As shown in FIG. 2, since water has virtuallyno yield point, the velocity of the water in contact with the surface ofsemiconductor wafer 202 is essentially zero and the velocity increasesthe further away from the semiconductor wafer. Accordingly, water isessentially stagnant at the point of contact with surface ofsemiconductor wafer 202. Since the water just above the surface ofsemiconductor wafer 202 is not moving, there is no mechanism for theflow of water to carry away particles at the surface of thesemiconductor water. Accordingly, a large amount of water flow is neededto create any significant velocity at the surface of semiconductor wafer202 to enable removal of particles from the surface.

In view of the foregoing, there is a need to provide methods andapparatuses that use fluids more efficiently to clean semiconductorwafers.

SUMMARY

Broadly speaking, the present invention fills these needs by providingmethods and apparatuses for cleaning a substrate. It should beappreciated that the present invention can be implemented in numerousways, including as a method, a system, or a device. Several inventiveembodiments of the present invention are described below.

In accordance with a first aspect of the present invention, a method forcleaning a substrate is provided. In this method, a flow of anon-Newtonian fluid is provided where at least a portion of the flowexhibits plug flow. To remove particles from a surface of the substrate,the surface of the substrate is placed in contact with the portion ofthe flow that exhibits plug flow such that the portion of the flowexhibiting plug flow moves over the surface of the substrate.

In accordance with a second aspect of the present invention, a methodfor cleaning a substrate is provided. In this method, a chamber isfilled with a non-Newtonian fluid and the substrate is placed into thechamber. Thereafter, additional non-Newtonian fluids are forced into thechamber to create a flow of the non-Newtonian fluid where at least aportion of the flow exhibits plug flow. The substrate is placed withinthe chamber such that the portion of the flow exhibiting plug flow movesover a surface of the substrate to enable removal of particles from thesurface.

In accordance with a third aspect of the present invention, a method forcleaning a substrate is provided. In this method, a surface of anapplication unit is provided and the application unit is disposed abovea surface of the substrate. A flow of a non-Newtonian fluid is appliedbetween the surface of the application unit and the surface of thesubstrate. At least a portion of the flow exhibits plug flow such thatthe portion of the flow exhibiting plug flow moves over the surface ofthe substrate to enable removal of particles from the surface of thesubstrate.

In accordance with a fourth aspect of the present invention, anapparatus for cleaning a substrate is provided. The apparatus is anapplication unit configured to be disposed above a surface of thesubstrate and configured to receive a non-Newtonian fluid. Theapplication unit is capable of applying the non-Newtonian fluid to thesurface to create a flow of the non-Newtonian fluid between theapplication unit and the surface. The flow has a portion that exhibitsplug flow such that the plug flow moves over the surface to enableremoval of particles from the surface.

In accordance with a fifth aspect of the present invention, an apparatusfor cleaning a substrate is provided. The apparatus includes a chamberthat has a cavity in a form of a conduit. The conduit is capable ofconveying a flow of a non-Newtonian fluid such that a portion of theflow exhibits plug flow. Further, the chamber is configured to containthe substrate such that the plug flow moves over a surface of thesubstrate to enable removal of particles from the surface.

Other aspects and advantages of the invention will become apparent fromthe following detailed description, taken in conjunction with theaccompanying drawings, illustrating by way of example the principles ofthe invention.

BRIEF DESCRIPTION OF THE DRAWINGS

The present invention will be readily understood by the followingdetailed description in conjunction with the accompanying drawings, andlike reference numerals designate like structural elements.

FIG. 1 is a shear stress and strain diagram of water.

FIG. 2 is a velocity flow profile for a flow of water on a surface of asemiconductor wafer.

FIG. 3 is a shear stress and strain diagram of a non-Newtonian fluid, inaccordance with one embodiment of the present invention.

FIG. 4 is a velocity flow profile for a plug flow of a non-Newtonianfluid within a chamber, in accordance with one embodiment of the presentinvention.

FIG. 5 is another velocity flow profile for a plug flow of anon-Newtonian fluid within the chamber, in accordance with oneembodiment of the present invention.

FIG. 6 is a flowchart diagram of a high level overview of a method forcleaning a substrate, in accordance with one embodiment of the presentinvention.

FIG. 7 is a simplified perspective view of an apparatus for cleaning asubstrate, in accordance with one embodiment of the present invention.

FIG. 8 is a sectional, side view of the application unit shown in FIG.7.

FIG. 9 is a velocity flow profile for a flow of a non-Newtonian fluidbetween the surface of apparatus and the surface of substrate shown inFIGS. 7 and 8, in accordance with one embodiment of the presentinvention.

FIG. 10 is a simplified perspective view of another apparatus forcleaning a substrate, in accordance with one embodiment of the presentinvention.

FIGS. 11A-11C show various, more detailed views of the apparatus shownin FIG. 10 for cleaning a substrate, in accordance with one embodimentof the present invention.

FIGS. 12A and 12B are different velocity flow profiles for differentflows of the non-Newtonian fluid through the chamber of FIGS. 10 and11A-11C, in accordance with embodiments of the present invention.

DETAILED DESCRIPTION

An invention is described for methods and apparatuses for cleaning asubstrate. It will be obvious, however, to one skilled in the art, thatthe present invention may be practiced without some or all of thesespecific details. In other instances, well known process operations havenot been described in detail in order not to unnecessarily obscure thepresent invention.

The embodiments described herein provide methods and apparatuses forcleaning a substrate. Essentially, non-Newtonian fluids that have thecapability to flow as plug flow are used to clean the substrate. As willbe explained in more detail below, a flow of non-Newtonian fluid isprovided and at least a portion of the flow exhibits plug flow. To cleanthe substrate, a surface of the substrate is placed in contact with theportion of the flow that exhibits plug flow. In one embodiment, the flowof non-Newtonian fluid is applied to the surface of the substrate suchthat the portion of the flow exhibiting plug flow flows over the surfaceof the substrate. In another embodiment, the substrate is immersed inthe flow of non-Newtonian fluid that exhibits plug flow.

FIG. 3 is a shear stress and strain diagram of a non-Newtonian fluid, inaccordance with one embodiment of the present invention. A non-Newtonianfluid is a fluid that does not flow when an applied shear forceapproaches zero. In particular, as shown in FIG. 3, the non-Newtonianfluid is characterized by having a yield point 302 (τ_(yield)), which isthe minimum force, or shear stress, required to initiate flow in thenon-Newtonian fluid. An example of a non-Newtonian fluid is a softcondensed matter which occupies a middle ground between the extremes ofa solid and a liquid. The soft condensed matter is easily deformable byexternal stress and examples of the soft condensed matter includeemulsions, colloids, foam, etc. It should be appreciated that anemulsion is a mixture of immiscible liquids such as, for example,toothpaste, mayonnaise, oil in water, etc. A colloid is polymersdispersed in water, and gelatin is an example of a colloid. Foam is gasbubbles defined in a liquid matrix, and shaving cream is an example offoam.

FIG. 4 is a velocity flow profile for a plug flow of a non-Newtonianfluid within a chamber, in accordance with one embodiment of the presentinvention. In this embodiment, the chamber is in the form of a pipe andFIG. 4 shows the velocity flow profile of any section of the pipe. Thenon-Newtonian fluid flowing through the pipe has a yield point that isgreater than the shear stress applied to the non-Newtonian fluid acrossdiameter 404 of the pipe. As such, the entire amount of flow exhibitsplug flow. Plug flow is defined by a flat velocity flow profile wherethe flow velocities are substantially uniform. In other words, with aplug flow, most of the non-Newtonian fluid material travels through thepipe at substantially the same velocity such that the plug flow has auniform velocity across diameter 404 of the pipe. Thus, velocities ofthe non-Newtonian fluid in contact with walls 402 of the pipe approachthe velocity of the non-Newtonian fluid at the middle of the pipe. Aplug flow therefore can result in a high velocity of the non-Newtonianfluid at or near the vicinities of walls 402.

FIG. 5 is another velocity flow profile for a plug flow of anon-Newtonian fluid within the chamber, in accordance with oneembodiment of the present invention. The chamber is in the form of apipe and FIG. 5 shows the velocity flow profile of any section of thepipe. In this embodiment, the shear stress applied to the non-Newtonianfluid flowing through the pipe exceeds the yield point of thenon-Newtonian fluid at some portions of the flow. The portions of theflow where the shear stress exceeds the yield point exhibit non-plugflows (i.e., Newtonian flows). A non-plug flow is characterized by avelocity gradient where the fluid velocity decreases from the portion ofplug flow to the region of walls 402. On the other hand, the portions ofthe flow where the yield point is greater than the shear stress exhibita plug flow. As shown in FIG. 5, the velocity flow profile shows theflow of non-Newtonian fluid having different flow characteristics. Plugflow is not obtained across the entire diameter 404 of the pipe.Specifically, portions 502 of the flow near walls 402 of the pipeexhibit non-plug flows, which are characterized by velocity gradientsthat have parabolic shaped velocity flow profiles. In contrast, plugflow has a flat shaped velocity flow profile and is exhibited at portion504 between the velocity flow gradients. FIG. 5 shows that portion 504of the flow that exhibits plug flow has higher velocities than portions502 of the flow that exhibit velocity gradients. Accordingly, in theembodiment of FIG. 5, the velocity is highest at portion 504 of the flowthat exhibits plug flow.

It should be appreciated that not all non-Newtonian fluids exhibit plugflow. A variety of factors (e.g., applied shear stress, properties ofthe non-Newtonian fluid, etc.) determine whether a non-Newtonian fluidflows as plug flow. For example, foam (a non-Newtonian fluid) thatdrains and collapses quickly does not have any significant mechanicalstrength. Such quick draining foam has virtually no yield point andwould most likely not flow as plug flow. In contrast, a high qualityfoam with a high yield point that drains slowly and can maintain itsintegrity indefinitely would likely flow as plug flow. There are avariety of methods to increase the yield point of a non-Newtonian fluid.For instance, to increase the yield point of foam, smaller bubbles maybe used. Additionally, increasing the amount of surfactants in foamand/or the use of different surfactants can limit foam draining, therebyincreasing the yield point of foam. Additional polymers or other bindingmaterials may be added to increase the yield point of the foam andreduce the rate of liquid draining from the foam.

FIG. 6 is a flowchart diagram of a high level overview of a method forcleaning a substrate, in accordance with one embodiment of the presentinvention. A substrate is any suitable base material. In one exemplaryembodiment, the substrate is a semiconductor wafer, which is a thinslice of semiconductor material, such as a silicon crystal, upon whichmicrocircuits are constructed by diffusion and deposition of variousmaterials. In another exemplary embodiment, the substrate is a hard diskplatter, which is composed of a round, rigid plate with a magnetic mediacoating. Starting in operation 602, a flow of non-Newtonian fluid isprovided and at least a portion of the flow exhibits plug flow. Inoperation 604, a surface of the substrate is placed in contact with theportion of the flow that exhibits plug flow such that the plug flowmoves over the surface of the substrate to remove particles from thesubstrate. The surface of the substrate is placed in contact with theportion of the flow that exhibits plug flow because such portion of theflow has the highest velocity. In effect, the surface of the substrateis placed at a portion of the flow that has the fastest rate of flow.The high velocity of the flow of the non-Newtonian fluid correlates tofaster collisions and increased collision frequency with particles onthe surface of substrate, thereby creating high friction at the surfaceof the substrate. The high velocity and resulting high frictioncorrespond to a high rate of particle removal from the surface of thesubstrate.

FIG. 7 is a simplified perspective view of an apparatus for cleaning asubstrate, in accordance with one embodiment of the present invention.As shown in FIG. 7, apparatus is an application unit 704 configured tobe disposed above a surface of substrate 702. In the embodiment of FIG.7, application unit 704 does not generate the non-Newtonian fluid butreceives the non-Newtonian fluid through any suitable number of inletconduits that supply the non-Newtonian fluid. Application unit 704applies the non-Newtonian fluid to surface of substrate 702 to create aflow of the non-Newtonian fluid between the application unit and thesurface of the substrate. In one embodiment, application unit 704 can bea proximity head configured to be placed proximate to the surface ofsubstrate 702. The proximity head may not necessarily be a “head” inconfiguration but may be any suitable configuration, shape and/or sizesuch as, for example, a manifold, a circular puck, a bar, a square, anoval puck, a tube, plate, etc., as long as the proximity may beconfigured in a manner that would enable the application ofnon-Newtonian fluid. In one embodiment, the proximity head may be a typeof circular puck as illustrated in FIG. 7. The size of the proximityhead may be varied to any suitable size depending on the applicationdesired. For more information on proximity heads, reference can be madeto U.S. Pat. No. 7,234,477 B2, the disclosure of which is incorporatedherein by reference.

FIG. 8 is a sectional, side view of the application unit shown in FIG.7. As shown in FIG. 8, a surface of application unit 704 is disposedabove surface of substrate 702. Application unit 704 receives thenon-Newtonian fluid through a top inlet conduit, and the applicationunit applies a flow of the non-Newtonian fluid between the surface ofthe application unit and the surface of substrate 702. The non-Newtonianfluid flows radially outward from a center of application unit 704 to anouter edge of the application unit and, accordingly, the direction ofthe flow is substantially parallel to the surface of substrate 702. Aswill be explained in more detail below, a portion of the flow betweenthe surface of application unit 704 and the surface of substrate 702exhibits plug flow such that the plug flow moves over the surface of thesubstrate to remove particles from the surface of the substrate. Therate of flow can be any suitable rate to accommodate a plug flow. Forexample, in one embodiment, the flow rate has a range from about 0.1mm/s to about 100 mm/s. As used herein, the term “about” means that thatthe specified dimension or parameter may be varied within an acceptabletolerance for a given application. In one embodiment, the acceptabletolerance is ±10%.

As shown in FIG. 8, application unit 704 applies the non-Newtonian fluidto a section of substrate 702. To clean the entire surface of substrate702, application unit 704 can be configured to move over the substratein a fashion that enables processing of all sections of the substrate.For example, application unit 704 may move in a linear fashion from acenter section of substrate 702 to an edge of the substrate. Otherembodiments may be utilized where application unit 704 moves in a linearfashion from one edge of substrate 702 to another diametrically oppositeedge of the substrate. Other non-linear movements may be utilized suchas, for example, in a radical motion, in a circular motion, in a spiralmotion, in a zig-zag motion, etc. Application unit 704 can also remainstationary while substrate 702 rotates and/or translates such that theapplication unit processes all sections of the substrate.

FIG. 9 is a velocity flow profile for a flow of a non-Newtonian fluidbetween the surface of apparatus and the surface of substrate shown inFIGS. 7 and 8, in accordance with one embodiment of the presentinvention. The non-Newtonian fluid flowing between the surface ofapplication unit 704 and the surface of substrate 702 has a yield pointgreater than the shear stress applied to the non-Newtonian fluid acrossgap 706. Accordingly, a substantial amount of the flow exhibits plugflow. In other words, the portion of the flow that exhibits plug flowextends substantially between the surface of application unit 704 andthe surface of substrate 702. Therefore, as shown in FIG. 9, the flowvelocity flow profile is substantially uniform. As used herein, in oneembodiment, the term “substantially” means that the plug flow extendsfrom about 80% to 100% between the surfaces.

A plug flow can result in a high velocity of the non-Newtonian fluid atthe surface of substrate 702. The high velocity flow of thenon-Newtonian fluid in contact with the surface of substrate 702correlates to faster collisions and increased collision frequency withparticles on the surface of the substrate, thereby assisting the removalof particles from the surface of the substrate. It should be appreciatedthat gap 706 between surface of application unit 704 and surface ofsubstrate 702 can have any suitable height to accommodate the flow ofnon-Newtonian fluid. In one exemplary embodiment, gap 706 between thesurface of application unit 704 and the surface of substrate 702 has aheight in a range from about 50 microns to about 10 millimeters.

FIG. 10 is a simplified perspective view of another apparatus forcleaning a substrate, in accordance with one embodiment of the presentinvention. Apparatus 1010 includes chamber 1004 that has a cavity in aform of a conduit. As will be explained in more detail below, theconduit is configured to convey a flow of a non-Newtonian fluid suchthat a portion of the flow exhibits plug flow. Chamber 1004 isadditionally configured to contain a substrate such that the plug flowmoves over surfaces (top and bottom surfaces) of the substrate to enableremoval of the particles from the surfaces of the substrate. FIG. 10shows that the cavity has a rectangular shape. However, it should beappreciated that the cavity may be defined by any suitable shapedimensioned to accommodate the substrate. For example, in anotherembodiment, the cavity can have a cylindrical shape.

FIGS. 11A-11C show various, more detailed views of the apparatus shownin FIG. 10 for cleaning a substrate, in accordance with one embodimentof the present invention. FIGS. 11A-11C illustrate a top view (FIG.11A), a side view (FIG. 11B), and an expanded side view (FIG. 11C) ofapparatus 1010. Apparatus 1010 includes a chamber, input ports 1132,holding pins 1112, and panel 1130. The chamber has a cavity in a form ofa rectangular conduit. The chamber has input end 1116 and output end1117 that is located opposite to the input end. Input end 1116 isdefined by a first opening that is capable of receiving substrate 702.Output end 1117 is defined by a second opening that is capable ofoutputting substrate 702. Additionally included is panel 1130 proximateto the first opening at input end 1116 that can be used to seal off thefirst opening.

Apparatus 1010 also includes input ports 1132 in the walls of thechamber. Input ports 1132 are configured to port the non-Newtonian fluidinto the chamber. As shown in the top view (FIG. 11A), in oneembodiment, input ports 1132 extend along a width of the chamber.However, it should be appreciated that input ports 1132 can have anysuitable shapes and sizes. A non-Newtonian applicator (not shown) can becoupled to input ports 1132 to port non-Newtonian fluid into the chamberthrough the input ports. In the embodiment of FIGS. 11A-11C, apparatus1010 includes two input ports 1132 located proximately to input end1116. The side view shows that one of the input ports 1132 is located atthe top of the chamber and the other input port is located at the bottomof the chamber. Input ports 1132 are placed opposite to each other inorder to create opposing flows of the non-Newtonian fluid from the topand bottom. The opposing flows assist in keeping substrate 702 suspendedin the middle of the chamber by exerting forces on opposite surfaces ofthe substrate. However, depending on the desired direction of flow,apparatus 1010 can include one input port or more than two input ports.Further, input ports 1132 are located proximate to input end 1116because the desired direction of flow is from the input end to outputend 1117. Nonetheless, it should be appreciated that input ports 1132may be placed in any suitable location within the chamber to createdifferent flow characteristics.

Still referring to FIGS. 11A-11C, before substrate 702 is placed intothe chamber of apparatus 1010, a non-Newtonian fluid applicator forcesnon-Newtonian fluid into the chamber through input ports 1132 to fillthe chamber with the non-Newtonian fluid. After the chamber is filledwith the non-Newtonian fluid, substrate 702 is placed in the chamberthough the first opening at input end 1116. Substrate 702 is placed suchthat the substrate is suspended in the non-Newtonian fluid. In otherwords, substrate 702 is immersed in the non-Newtonian fluid and is notin contact with a wall of the chamber. The non-Newtonian fluid has thecapability to support substrate 702 such that the substrate is suspendedin the middle of the chamber. The non-Newtonian fluid can supportsubstrate 702 almost indefinitely, even without flow, because the weightof the substrate is sufficiently small such that the substrate restingon the non-Newtonian fluid does not exceed the yield point of thenon-Newtonian fluid.

After substrate 702 is placed into the chamber, panel 1130, which isproximate to the first opening at input end 1116, closes to seal off thefirst opening. The non-Newtonian fluid applicator then forces additionalnon-Newtonian fluids into the chamber to create a flow of thenon-Newtonian fluid. Since the non-Newtonian fluid cannot exit throughthe first opening at input end 1116, the non-Newtonian fluid forcedthrough input ports 1132 flows from the input end towards output end1117 to exit at the second opening at the output end. The direction ofthe flow is substantially parallel to surfaces of substrate 702. As willbe explained in more detail below, a portion of the flow exhibits plugflow, and the substrate is placed within the chamber such that the plugflow moves over surfaces of substrate 702 to remove particles from thesurfaces.

To enable the flow to move over surfaces of substrate 702, the substrateis held within the chamber. Embodiments of apparatus 1010 can includeone or more holding pins 1112 within the chamber. Holding pins 1112 areused to receive an edge of substrate 702 to prevent horizontal movementof the substrate. In the embodiment of FIGS. 11A-11C, holding pins 1112are located proximate to output end 1117 to prevent substrate 702 frommoving through the second opening at the output end when thenon-Newtonian fluid flows though the chamber. Holding pins 1112 can holdsubstrate 702 while enabling the non-Newtonian fluid to flow through theconduit. To allow horizontal movement of substrate 1112, holding pins1112 may be configured to release a hold of the substrate to allow theflow of the non-Newtonian fluid to move the substrate along the conduitand out of the second opening at output end 1117. For example, in oneembodiment, holding pins 1112 can be lowered to allow movement ofsubstrate 702.

FIGS. 12A and 12B are different velocity flow profiles for differentflows of the non-Newtonian fluid through the chamber of FIGS. 10 and 11,in accordance with embodiments of the present invention. Thenon-Newtonian fluid of FIG. 12A flowing through chamber has a yieldpoint greater than the shear stress applied to the non-Newtonian fluidacross height 1204 of the chamber. Accordingly, in one embodiment, asubstantial amount of the flow exhibits plug flow. In other words, theplug flow extends to about an entire amount of the flow. Therefore, asshown in FIG. 12A, the flow velocity flow profile is substantiallyuniform.

FIG. 12B is another velocity flow profile for a flow of non-Newtonianfluid through the chamber, in accordance with another embodiment of thepresent invention. Here, the shear stress applied to the non-Newtonianfluid flowing through the chamber exceeds the yield point of thenon-Newtonian fluid at some portions of the flow. As discussed above,the portions of the flow where the shear stress exceeds the yield pointexhibit non-plug flows. The portions of the flow where the yield pointis greater than the shear stress exhibit plug flow. As shown in FIG.12B, the velocity flow profile shows the flow of non-Newtonian fluidhaving different flow characteristics. Plug flow is not obtained acrossthe entire height 1204 of the chamber. Specifically, portions of theflow near walls of the chamber exhibit non-plug flows, which haveparabolic shaped velocity gradients. Plug flow has a flat shapedvelocity flow profile and is exhibited at portion 1206 between thevelocity gradients.

To exploit the benefits of increased particle removal associated withplug flow, substrate 702 is placed within the chamber such that theportion of the flow exhibiting plug flow moves over a surface of thesubstrate. With the embodiment shown in FIG. 12A, since plug flow isobtained substantially across the entire height 1204 of the chamber,substrate 702 can be placed anywhere within the chamber. With theembodiment shown in FIG. 12B, substrate 702 is placed within portion1206 that exhibits plug flow. It should be appreciated that gaps 1202between the walls of chamber and the surfaces of substrate 702 can haveany suitable height to accommodate the flow of non-Newtonian fluid. Inone exemplary embodiment, gap 1202 has a height in a range from about 50microns to about 10 millimeters.

It should be appreciated that chemicals and/or gases in thenon-Newtonian fluid can further assist in the removal of particles fromsurfaces of substrate 702. Specifically, chemicals and/or gases can beincluded in the non-Newtonian fluid to chemically react or to facilitatechemical reactions with the particles and/or surfaces of substrate 702.Any suitable chemicals and/or gases can be included in the non-Newtonianfluid to facilitate substrate cleaning. For example, foam that iscomprised of ozone bubbles and deionized water can be applied to asubstrate. The ozone in combination with the deionized water chemicallyreacts with an organic photoresist material, which is commonly used insemiconductor photolithography operations, to remove the photoresistmaterial from surface of substrate 702.

Furthermore, it should be appreciated that in addition to cleaning, theembodiments described above can be applied to other suitablesemiconductor device manufacturing processes that depend on masstransfers. For example, a plug flow of non-Newtonian fluid can be usedfor plating, which is a surface-covering technique in which a metal iscoated onto a surface. The application of a flow of non-Newtonian fluidexhibiting plug flow onto a surface to be plated results in highvelocity at or near the surface. The high velocity equates to a highmass transfer of metal onto the surface, thereby reducing the amount offluid used to coat the surface. In another example, the embodimentsdescribed above can be applied to wet etching, where a flow of thenon-Newtonian fluid (e.g., a chemical etchant) exhibiting plug flow isapplied onto a surface of a substrate to remove a material being etched.

In summary, the above-described embodiments provide methods andapparatuses for cleaning a substrate. To clean a surface of thesubstrate, the substrate is placed in contact with a flow ofnon-Newtonian fluid that exhibits plug flow. For the same transfer ofmass, plug flow has a higher flow velocity at or near the surface of thesubstrate when compared to the use of a Newtonian fluid, such as water,to clean a substrate. The friction created by the plug flow at thesurface of the substrate is by orders of magnitude higher than thenegligible friction created by the Newtonian fluid. As a result, the useof a non-Newtonian fluid exhibiting plug flow to clean substrates ismore efficient than the use of a Newtonian fluid because lessnon-Newtonian fluid is used to achieve the same cleaning effect whencompared to the use of the Newtonian fluid.

Although a few embodiments of the present invention have been describedin detail herein, it should be understood, by those of ordinary skill,that the present invention may be embodied in many other specific formswithout departing from the spirit or scope of the invention. Therefore,the present examples and embodiments are to be considered asillustrative and not restrictive, and the invention is not to be limitedto the details provided therein, but may be modified and practicedwithin the scope of the appended claims.

What is claimed is:
 1. An apparatus for cleaning a substrate,comprising: an application unit having a top inlet conduit and a bottomplate section integrally formed as a single member, the top inletconduit having an opening for receiving a non-Newtonian fluid and beingconfigured to guide the non-Newtonian fluid toward a surface of asubstrate along a first flow path, the bottom plate section having anopening through which the non-Newtonian fluid can flow and beingconfigured to guide the non-Newtonian fluid away from the opening in thebottom plate section and over the surface of the substrate along asecond flow path, and the bottom plate section defining an area that isless than an area of the surface of the substrate, the second flow pathbeing perpendicular to the first flow path, and a surface of the bottomplate section being disposed above and parallel to the surface of thesubstrate so as to define a gap between the surface of the bottom platesection and the surface of the substrate, the gap having a heightconfigured to create a flow of the non-Newtonian fluid in which aportion of the flow exhibits plug flow, and the plug flow moves over thesurface of the substrate to remove particles from the surface of thesubstrate.
 2. The apparatus of claim 1, wherein the bottom plate sectionhas a rectangular configuration, a circular configuration, or an ovalconfiguration.
 3. The apparatus of claim 1, wherein the gap has a heightin a range from 50 microns to 10 millimeters.
 4. The apparatus of claim1, wherein the application unit is configured to remain stationaryrelative to the substrate during cleaning of the substrate.
 5. Anapparatus for cleaning a substrate, comprising: an application unithaving a top inlet conduit and a bottom plate section integrally formedas a single member, the top inlet conduit having an opening forreceiving a non-Newtonian fluid and being configured to guide thenon-Newtonian fluid toward a surface of a substrate along a first flowpath, the bottom plate section having an opening through which thenon-Newtonian fluid can flow and being configured to guide thenon-Newtonian fluid away from the opening in the bottom plate sectionand over the surface of the substrate along a second flow path, and thebottom plate section defining an area that is less than an area of thesurface of the substrate, the second flow path being perpendicular tothe first flow path, and a surface of the bottom plate section beingdisposed above and parallel to the surface of the substrate so as todefine a gap between the surface of the bottom plate section and thesurface of the substrate, the gap having a height in a range from 50microns to 10 millimeters.
 6. The apparatus of claim 5, wherein theapplication unit is configured to remain stationary relative to thesubstrate during cleaning of the substrate.
 7. The apparatus of claim 5,wherein the bottom plate section has a rectangular configuration, acircular configuration, or an oval configuration.